Product Briefing Outline: Synopsys Inc. has introduced
a new family of process-aware design-for-manufacturing (PA-DFM)
products that analyze variability effects at the custom/analog design
stage for 45nm node and below. The PA-DFM product family's core
products -- Synopsys Seismos and Paramos - link manufacturing variation
information back to design, enabling custom IC (IP, cell, memory and
analog) designers to optimize layouts and maximize yields.
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Product Briefing Outline: PDF Solutions Inc. has
introduced a new release of its ‘Circuit Surfer' software for
characterizing and optimizing the parametric yield of analog and radio
frequency (RF) integrated circuit (IC) designs. The new release
features the company's patented mismatch simulation technology, which
helps to minimize the number of simulations required to characterize
parametric yield. It is also claimed to reduce design re-spins by
identifying parametric yield loss mechanisms not visible when using
verification methods based on corner modeling.
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Product Briefing Outline: Carl Zeiss SMT has announced
the development of its lithography optical system, ‘Starlith' 1900i.
The new system has a numerical aperture (NA) of 1.35, the highest NA
currently designed, that will be used for volume chip production at
40nm half-pitch node. The system will be part of ASML's new ‘TWINSCAN'
XT:1900i immersion lithography tool that will begin shipments in 2007.
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Product Briefing Outline: ASML has introduced the
‘TWINSCAN' XT:1900i. In combination with ASML proprietary low k1
capabilities, this new system is designed to extend optical immersion
lithography for volume production at the 40nm half-pitch dimensions
with an overlay specification of 6nm (SMO). ASML's newest 193-nm
wavelength immersion scanner uses a 1.35 NA inline catadioptric lens
assembly that is near the practical limit for water-based immersion
technology. ASML expects to begin shipping the XT:1900i by mid 2007.
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Product Briefing Outline: Brion Technologies has
introduced the ‘Tachyon M3D,' computational technology to enable more
accurate OPC and OPC verification by incorporating mask 3D imaging
effects.
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Product Briefing Outline: Nikon Corporation has
introduced a new lithography tool that is designed to meet the
requirements for mass production of 45nm memory and of 32nm logic
devices. The NSR-S610C, an ArF immersion scanner, includes an advanced
1.30 NA projection lens and POLANO, Nikon's fourth generation
polarization technology. The system will also include proprietary Nikon
Local Fill Technology and the Tandem Stage, which enable the system to
achieve a claimed throughput of 130 wafers or more per hour. Systems
will start shipping by the end of 2006, according to the company.
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Product Briefing Outline: Blaze DFM, has announced the
Release 1.1 update to ‘Blaze MO' optimization software, the company's
"Electrical DFM" solution. In electrical DFM, "design requirements"
explicitly refers to timing and power (electrical) requirements, not
just geometric information. Bringing design requirements forward into
manufacturing means using the actual timing and power constraints
supplied by the design team to drive what happens in manufacturing.
Typically, this is done by interfacing with the resolution enhancement
technology (RET) process in manufacturing.
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Product Briefing Outline: Litel
Instruments, has released of two new products designed to increase silicon chip
performance and yield in leading edge semiconductor factories. The new
products, dubbed ‘Distortion Mapper' (DMAP) and ‘Transmission Mapper' (TMAP), are
used for analyzing and optimizing lens and illumination performance of
photolithography tools.
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Product Briefing Outline: Synopsys has launched its
PrimeYield tool suite that is designed to integrate design with
manufacturing by accurately predicting design-induced mechanisms that
threaten manufacturing tolerances and by providing automated correction
guidance to upstream design implementation tools. PrimeYield provides
predictive and corrective actions for manufacturing-sensitive design
patterns before tapeout, according to the company. This is due to using
production-baseline technology and manufacturing models by the leading
foundries and integrated device manufacturers (IDMs). Synopsys reports
that PrimeYield can reduce time to yield by 4 to 6 weeks at advanced
nodes.
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Product Briefing Outline: Entegris has introduced its
‘LiquidLens' ultrapure water (UPW) purification system that is designed
specifically for 193nm ArF immersion lithography systems. The
sub-system combines advanced technology and process expertise from both
Entegris and the former Mykrolis as a result of their merger in August
2005 to tackle high-purity issues associated with the needs of
immersion lithography.
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