Product Briefing Outline
: TecHarmonic Inc. has
launched the Alpine-S, claiming that it is the industry's first and
only point-of-use (PoU) gas abatement system with the capability to
abate all process and perfluorocompound (PFC) gas emissions with
destruction and removal efficiencies (DRE) well over 95 percent for
both chemical vapor deposition (CVD) and etch applications.
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