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New Product: PoU abatement system from TecHarmonic reaches 95 percent DRE

29 June 2006 | EHS
TecHarmonicProduct Briefing Outline: TecHarmonic Inc. has launched the Alpine-S, claiming that it is the industry's first and only point-of-use (PoU) gas abatement system with the capability to abate all process and perfluorocompound (PFC) gas emissions with destruction and removal efficiencies (DRE) well over 95 percent for both chemical vapor deposition (CVD) and etch applications. Read more >>