Online information source for semiconductor professionals

Product Briefing Outline: K-Patents launched the Semicon Process Refractometer PR-23-MS real-time chemical concentration monitoring system. PR-23-MS provides a continuous 4-20 mA or digital measurement signal, which offers many possibilities for real-time monitoring and process control. It is physically small and easy to install in the bulk chemicals supply and distribution, and in point-of-use chemical blending, mixing, dilution and spiking applications. Read more >>

Product Briefing Outline: NEHP has introduced a family of modules that help tool installers dramatically decrease the time, cost and complexity of a fab installation. The new line features a full range of pre-manufactured utility modules that streamline site process piping tool installation. NEHP claims its new modules have been proven to reduce the time, cost, footprint and amount of on-site labor required for installation while increasing safety. Read more >>

Product Briefing Outline: Advanced Energy Industries has introduced its latest power platform: the ‘Paramount' RF-power delivery system. A key aspect of the new platform is power-delivery accuracy and control for increasingly complex film stacks and fine feature sizes. The 3kW Paramount system is well suited for both etch and deposition processes in semiconductor, FPD, MEMS and solar photovoltaic manufacturing. Read more >>

Product Briefing Outline: MKS Instruments has introduced the ‘CONTINUUM' Universal Industrial Network Gateway with ‘cLogic' and the ‘MacroNode' I/O Controller with EtherCAT interface. These new solutions offer more precise process control through faster network performance and improved web browser diagnostics, according to the company. Read more >>

Product Briefing Outline: Hach Ultra has introduced its ORBISPHERE 510 instrument with the capability of connecting TC sensors for process control monitoring. The instrument offers multi channel capability for both thermal conductivity sensors measuring H₂ or N₂ and for electrochemical sensors measuring O₂. This complete system is designed for process monitoring in liquid or gas phases across a wide range of applications for the electronics industry. Read more >>

Product Briefing Outline: Integrated Dynamics Engineering (IDE) has made significant upgrades to its popular EMI cancellation system for electron beam microscopes, MRI and lithography equipment. The MK 4 version now has state-of-the-art design enhancements to its active, analog and digital controls with improved DC and AC disturbance safeguards. A new patent-pending control system employs both analog controls to manage high frequencies and digital controls to handle the more complex quasi-DC rejection needs, while providing for operator interaction.
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Product Briefing Outline: OSRAM has introduced a new xenon excimer lamp system called ‘XERADEX' that is claimed to yield four times the vacuum ultraviolet (VUV) radiation power of conventional excimer radiators in pulse mode. Applications include wafer surface treatment, ozone production, lacquer frosting, water purification, and many more. The quartz bulb functions as a dielectric barrier within a unique electrode system, which prevents the formation of an electric arc during the discharge phase. Read more >>

Product Briefing Outline: The Partek operation of Parker Hannifin has introduced the 20 Series fluoropolymer diaphragm valve that is claimed to feature a flow path and valve seat area that optimizes fluid flow dynamics, for minimal pressure drop and enhanced flow rates, and resistance to aggressive media, making it suitable for CMP slurry and other aggressive fluid applications. Read more >>

Product Briefing Outline: MKS Instruments has introduced the Ion Systems Model 5200-SR Digital Ionization Sensor for use in semiconductor equipment front end modules (EFEMs) or in process modules, due to its small footprint. Read more >>

Product Briefing Outline: Entegris Inc. has introduced the new ‘Guardian' family of high-flow cartridge filters that are designed to be non-reactive to a wide range of plating additives and provide higher levels of particle retention as well as longer life. Guardian ECD filter cartridges are applicable to high-purity electrochemical deposition processes, such as copper, nickel, and gold plating. Read more >>