Online information source for semiconductor professionals

Product Briefing Outline: Oerlikon Leybold Vacuum has introduced TURBOVAC SL, a line of high-reliability mechanical turbomolecular vacuum pumps for semiconductor manufacturing, analytical instrumentation, R&D and other demanding applications. The pumps feature extreme durability, ease of use and several innovations that simplify and improve incorporation into customer equipment. Read more >>

Product Briefing Outline: NEHP has utilized return on investment modeling developed in-house to better assess the cost of installation of major tools using a modular approach versus traditional stick-built methods and the timeline for tool installation from Dock to Signoff.  According to NEHP, its 3D or 2D P&ID pre-packaged modules have reduced costs by an estimated 14 – 49% (based on degree of modularity and tool complexity) and schedules by as much as 30 to 35% from start to finish (see Figure 1). Complete tool pre-facilitization techniques and solutions prior to tool arrival on the fab floor have been developed, resulting in significant cost savings that have been modeled by NEHP. Read more >>

Product Briefing Outline: INFICON has introduced the XTC/3 a thin film deposition controller for single and multiple-layer processes. The XTC/3 utilizes INFICON's patented ModeLock technology that provides mode hop prevention while in operation. The controller is designed to provide accurate control of deposition rate and thickness, for virtually any number of layers, while it is easy to install and offers high reliability, according to the company. Read more >>

Product Briefing Outline: RASIRC has revealed its next generation high-purity steam generation system called the ‘Steamer UHP 125.' With a reduced footprint, it can directly replace torches, bubblers, and direct water injection systems in 6", 8", and 12" furnaces as well as in other applications where flow rates of up to 12.5 slm of pure water vapor are needed. It has the ability to control flow into vacuum or atmospheric pressure systems. It generates Ultra High Purity steam from de-ionized water without hydrogen or oxygen. Read more >>

Product Briefing Outline: Aquest Systems, a three-year-old start-up, has launched ‘FabEX,' a new type of automated material handling system (AMHS) designed to improve fab productivity by delivering higher speeds and greater capacity than conventional AMHS.  According to company officials, the complete FabEX product portfolio will help deliver on Aquest's ‘No-Wait-Manufacturing' methodology by enabling chipmakers to significantly reduce or eliminate the unnecessary waits or delays that negatively impact both the productivity and profitability of their fabs. Read more >>

Product Briefing Outline: GF Piping Systems has introduced the new Type 567 Butterfly Valve in large diameter sizes up to 12 inches.  The new corrosion-resistant valve incorporates a double eccentric operating principle that provides improved wear and easier operation over traditional eccentric style butterfly valves.  Typical applications include industrial water treatment and waste water systems. Read more >>

Product Briefing Outline: A unique Roller Pinion System (RPS) from Nexen Group, Inc., allows machine designers to incorporate highly accurate linear and rotary motion-control functions with zero backlash and speeds as high as 11 meters per second (36.1 feet per second).  The patented RPS technology can replace typical rack and pinions, linear motors, spur gears, chain/belt drives and ball-screws in critical motion-control applications that require high speed, great accuracy, and low maintenance and noise. Read more >>

Product Briefing Outline: GF Piping has announced the availability of a new Type ‘567/568 Butterfly Valve.'  The new corrosion-resistant valve incorporates several new design features that result in long service life, high safety, excellent sealing capabilities, and modular flexibility. Waste water and electroplating applications are of particular application uses, according to the company. Read more >>

Product Briefing Outline: Entegris has introduced the new Torrento family of high-flow liquid filters that help improve liquid contamination control of nano-scale particles in wet etch and clean (WEC) manufacturing processes used in advanced semiconductor applications. Built on a combination of new membrane technology and an advanced ATE device construction, the Torrento filters provide high-yield, rapid bath clean-up cycles, extended filter life, and allow for fast change-outs and increase cleanliness. Read more >>

Product Briefing Outline: Aerotech’s WaferMax T rotary stage was originally designed for the demands of precision wafer inspection; however, due to its low height design it can be used in a wider range of tool applications where high-throughput production performance with high levels of precision are required especially when space and access are limited. The WaferMax-T rotary stage has full 360-degree rotation and a certified accuracy of +/-5arc/sec. Read more >>