Product Briefing Outline: Applied Materials has unveiled its ‘Applied iSYS’ platform, the industry’s first fully-integrated abatement and vacuum pumping solution for controlling emissions in the semiconductor fab. Networked with an Applied process tool, the iSYS system can deliver typical annual savings in power, water and gas consumption equivalent to 200MWh of energy or 220,000 pounds of CO2 emissions, compared to currently available configurations. In addition to having environmental benefits, the iSYS system lowers the utility cost for abatement and vacuum pumping on a process tool by more than 20%.
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Product Briefing Outline: Tiger Optics has introduced the ‘Tiger-i’ cleanroom analyzer for gas phase airborne molecular contaminants (AMCs). The Tiger-i line employs Tiger Optics’ patented Continuous Wave Cavity Ring-Down Spectroscopy (CW-CRDS) technology that is claimed to provide accurate and immediate, calibration-free analysis.
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One of the equipment suppliers that consistently brings out new products is KLA-Tencor. However, the metrology supplier rarely figures in the most popular rankings in any given year. That has changed in 2008 with its TeraFab tool. Although only released recently, the fifth most popular product was from TEL and Novellus for copper interconnects.
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Product Briefing Outline: Edwards has launched the ‘Sirius 6000’ abatement system. Designed for low cost-of-ownership, the Sirius 6000 system addresses greenhouse gas abatement challenges arising from dielectric and polysilicon etch processes used in semiconductor manufacturing. The design uses an energy efficient microwave plasma in a carefully controlled chemical environment and an integrated wet scrubber to reduce fab greenhouse gas emissions by as much as 95 percent over a wide range of total flow rates and perfluorocompound (PFC) concentrations.
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Product Briefing Outline: The HTZ Smart ‘HART’
Humidity and Temperature Transmitter from Moore Industries
simultaneously measures temperature and humidity in processes that
require extremely close monitoring of humidity, temperature and
dewpoint. This includes cleanrooms, assembly areas and storage
facilities. The unit can be programmed or queried from any point along
one of the transmitter’s dual 4-20mA loops.
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Product Briefing Outline: Purafil has introduced its
2nd Generation MediaPAK Disposable Plastic Module for clean air
filtration systems. The module features the new Taper Fit Closure
(TFC), which offers a quick-connect positive mechanical seal providing
a leak-free zone. The TFC appears on each side of the module. When two
or more modules are adjacent within the application, the TFCs unite to
form a positive connection or seal.
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Product Briefing Outline: Integrated Dynamics
Engineering (IDE) has launched its generation AWP 300-2 wafer sorter.
The AWP 300-2 uses a unique dual robot design that is claimed to
achieve reliable throughput of 150 wafers per hour, as well as provide
improved wafer handling safety. IDE is currently shipping the first
machines to the Pac Rim and Europe.
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Product Briefing Outline: Flomerics has announced the
availability of six new "SmartParts" for its Flovent software that save
time and improve accuracy in simulating the performance of diffusers.
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Product Briefing Outline: Ansell Healthcare has
produced a new ‘ChemTek' glove that is designed to provide the highest
level of protection for handling hazardous chemicals in manufacturing
and chemical processing environments. The new ChemTek product line is
comprised of two different glove styles that offers chemical protection
for first responders and others who may be faced with potentially
hazardous or unknown substances.
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Product Briefing Outline: GE Analytical Instruments
has introduced the Sievers 500 RL On-Line Total Organic Carbon (TOC)
Analyzer. The reagentless analyzer is designed for continuous
monitoring of organics in ultrapure water (UPW) for pharmaceutical,
microelectronics, and power applications with a 0.03 ppb limit of
detection and autozero capabilities, according to the company.
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