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Rudolph releases faster ‚??Genesis Enterprise‚?? yield management software

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Product Briefing Outline: Rudolph Technologies has released ‘Genesis Enterprise’ version 7.0. Genesis is an offline yield analysis and data mining software with parametric yield management tools designed to maximize factory efficiency and identify causes of yield loss. Since Rudolph’s acquisition of the Yield Dynamics software business from MKS Instruments a year ago, Rudolph have made significant performance improvements to the product.

Problem: Yield management tools need to be designed to maximize factory efficiency and identify causes of yield loss so minimize wafer losses and boost overall yields. As scaling continues and more complex processes and materials are employed, greater levels of process control are required.

Solution: Genesis 7.0 is much faster and offers greater functionality. Specific enhancements building on the Genesis patented technology include more robust genealogy, more efficient charting and analysis, easier data management and more intuitive wafer/sheet mapping and bin maps. The Genesis Enterprise platform includes data acquisition and integration, data analysis, automated decision making through data mining and a development environment through work flow and scripting. Specialized analysis algorithms identify domain-specific issues, such as spatial anomalies, wafer processing sequence problems, commonality of effects, and systematic and random yield loss.

Applications: IC fabrication yield management.

Platform: Genesis software seamlessly handles data from any source: parametric, defect, memory, design, or assembly and packaging, and easily integrates all-surface defect analysis, fault detection, and run to run process control to help users achieve maximum efficiency. Genesis now supports ‘Oracle’ 11g and ‘Windows’ (32bit and 64bit).

Availability: July 2011 onwards.

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