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New Product: Timbre’s Profiler Application Server virtually eliminates downtime
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Product Briefing Outline: Timbre Technologies Inc., a
Tokyo Electron-owned company, has announced the introduction of their
next generation Profiler Application Server, PAS-T4, used to process
optical measurements.
Problem: PAS T4 is optimized for Timbre's ODP 2006
optical metrology platform, and includes a robust fault tolerance
module that ensures maximum uptime and system reliability. The new
platform, in feedback/control mode, is claimed to dramatically decrease
costs through the reduction of re-start times after production-down
situations.
Additionally, the new system protects data with a new automatic data loss prevention system.
Solution:
The new T4 system will also provide a significant improvement in
computation power, with search speeds up to two times faster than
previous PAS generations. The speed enhancements enable timely
metrology results to accommodate the trend towards higher sample rates
and for complex applications such as BEOL, FinFet and advanced STI
structures.
Applications: Scatterometry-based optical metrology-ODP.
Platform:
T4 has full backwards compatibility with previous versions of PAS and
will support all advanced features, including the popular Focus
Exposure Monitor (FEM) option for process window analysis and the
Desktop Profile Application Client (PAC) option for remote PAS
connection.
Availability: March 2007 onwards.
