Online information source for semiconductor professionals

New Product: Tiger Optics’ gas phase AMC analyzer measures parts per trillion trace levels

15 January 2009 | By Mark Osborne | Product Briefings > Cleanroom

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

TSMC honors suppliers at annual Supply Chain Management Forum - 03 December 2008

‘Tiger-i’ cleanroom analyzer for gas phase airborne molecular contaminantsProduct Briefing Outline: Tiger Optics has introduced the ‘Tiger-i’ cleanroom analyzer for gas phase airborne molecular contaminants (AMCs). The Tiger-i line employs Tiger Optics’ patented Continuous Wave Cavity Ring-Down Spectroscopy (CW-CRDS) technology that is claimed to provide accurate and immediate, calibration-free analysis.

Problem: The Tiger-i line measures into parts per trillion (ppt) levels of trace hydrofluoride (HF) and hydrochloride (HCl) gases, which combined with ammonia or amines, can lead to contamination and overall quality breakdown. The built-in reference cell and automated tune function of the Tiger-i provides 99.9 percent uptime without calibration, consumables or maintenance, according to the company. By enabling manufacturers to quickly and reliably correlate events, such as tool issues, chemical spills, material outgassing and even loadlock openings, process yields can be continuously optimized.

Solution: The Tiger-i cleanroom analyzer is currently available in two platforms for optimal service, the Tiger-i 1000 and the Tiger-i 2000. The Tiger-i 1000 HF and HCl analyzers employ a split architecture that allows users to place sensor modules up to 50m away from the central analyzer, and is based on the LaserTrace line of analyzers.

Applications: It serves a wide array of analytes, including moisture, oxygen, methane, acetylene, hydrogen cyanide, formaldehyde and ammonia.

Platform: The Tiger-i 2000 HF and HCl analyzers provide a compact, integrated architecture for enhanced analysis with a smaller footprint, and is based on the award-winning HALO line of mini-CRDS analyzers. Tiger Optics ensures the quality of the Tiger-i line and all of its analyzers through its recently announced International Organization for Standardization (ISO) 9001:2000 certification.

Availability: Currently available.

Related articles

New Product: Tiger Optics‚?? new HALO+ CRDS analyzer covers widest dynamic range - 06 September 2007

Tiger Optics appoints product manager of its environmental division - 15 July 2011

NASA warns increase in nitrogen trifluoride (NF3) in atmosphere - 24 October 2008

PFA trace metals leaching ‚?? determining future improvements in bulk chemical delivery distribution - 01 June 2006

Edition 38: Evaluation of particle shedding and trace metal extraction from high purity pumps - 25 February 2009

Reader comments

No comments yet!

Post your comment

Name:
Email:
Please enter the word you see in the image below: