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Product Briefing Outline: FEI has launched the ‘Magellan’ series, a new class of instruments dubbed extreme high-resolution scanning electron microscopes (XHR SEMs). The Magellan XHR SEM allows scientists and engineers to quickly view elements such as 3D surface images from many different angles and at resolutions below one nanometer (about the size of ten hydrogen atoms, side-by-side). The Magellan XHR SEM images samples at very low beam energies, avoiding distortions otherwise caused by the beam penetrating into the material below.

Problem: Sub-nanometer resolution has critical value in scientific research and industrial R&D. In addition, it is an absolute requirement in process development, monitoring and control applications in advanced semiconductor manufacturing. The Magellan family extends this capability to applications that were previously impossible or impractical with conventional SEM, transmission electron microscope (TEM) or focused ion beam (FIB) systems.

Solution: The Magellan family’s performance derives from the integration of new electron optical elements, proprietary electron gun technology, a highly accurate five-axis piezo-ceramic stage and high stability platform with a fully configurable analytical chamber. The stage readily accommodates large samples or multiple smaller samples, while providing fast, accurate navigation and unequaled stability. For example, the ability to provide sub-nanometer resolution over a broad range of beam energies, from less than one kilovolt (kV) to 30kV, allows semiconductor manufacturers to see critical detail on complex three-dimensional structures in 32nm nodes and below, with unprecedented clarity and contrast. Researchers in materials science will now have the ability to generate high-resolution, surface-sensitive images of carbon nanotubes, nanowires and catalysts without the image distortions caused by electrical charging from higher energy electron beams. Across the board, the Magellan family extends the range of nanoscale imaging and analysis, with the speed and ease of use of traditional SEMs.

Applications: Rapid 3D surface imaging at sub-nanometer resolution.

Platform: The Magellan family comes in two models. The Magellan 400 is optimized for scientific research while the Magellan 400L is optimized for semiconductor labs. The semiconductor lab model comes with a load-lock feature that speeds up sample throughput, and includes a retractable solid state backscatter electron detector (SSBSED) and S2 compliance kit. Both models have an optional, full environmental enclosure to isolate the instrument from thermal and acoustic interferences, ensuring peak performance while relaxing site requirements and facility preparation costs.

Availability: September 2008 onwards.