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Product Briefing Outline: Swagelok has introduced the Swagelok ALD liquid injection valve. Featuring the ability to vaporize liquid precursors inside its valve body, the ALD liquid injection valve dispenses precursors and purge gases into ALD tool chambers in precisely measured, precisely timed pulses. The valve is one part of the ultrahigh-purity Swagelok ALD diaphragm valves.

Problem: In liquid precursor vaporization technology, high temperatures are required to vaporize a liquid chemical within the valve body. The chemistry is then delivered to the ALD chamber. For consistent precursor delivery, temperature must be tightly controlled.

Solution: In response to the increasing use of liquid precursors in the atomic layer deposition (ALD) process, Swagelok’s ALD liquid injection valve features a high-end PFA seat seal, enabling the valve to handle temperatures up to 200°C (392°F). Temperature control can be achieved through heater cartridges optimally placed in the ALD diaphragm valve body. Swagelok uses Finite Element Analysis (FEA) to simulate the temperature effect, enabling customized placement of the heater cartridges according to a tool manufacturer’s particular needs. The full line of Swagelok ALD diaphragm valves feature rapid actuation speed, with valve actuation times less than 5 milliseconds and an ultrahigh cycle life—exceeding 25 million cycles during product evaluation. The patent-pending flow setting feature enables the consistent delivery of process gas. 

Applications: ALD liquid precursors.

Platform: Manufactured from 316L VIM/VAR stainless steel, the valve body is available with 1/4 inch ‘VCR’ metal gasket face seal and 1/4 inch and 6 mm tube butt weld end connections. Other available options include a high-flow model, as well as multi-port, multi-valve manifold, and modular surface mount configurations.

Availability: Currently available.