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New Product: SAFC Hitech‚??s OM700 enables efficient organometallic precursor delivery

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SAFCProduct Briefing Outline: SAFC Hitech has introduced the OM700, a bubbler that offers a cost-efficient migration path to controlled precursor delivery for larger lot sizes, enabling a reduction in process downtime, combined with increased safety controls.

Problem: As the demand for higher throughput and process efficiency grows, more efficient methods for precursor delivery will be required. Reliable, flexible, highly controllable dosimetry of organometallic precursors is key to production environments where downtime is prohibitively expensive. The frequency of container change out can be minimised by moving to larger batch sizes but maintaining temperature control becomes difficult using conventional heater baths. Also, bubbler size is limited to that of the installed bath.

Solution: The OM700 is designed to provide a reliable and highly controllable dosimetry of highly sensitive organometallic precursors, such as trimethylgallium (TMG), trimethylaluminum (TMA) and triethylgallium (TEG), in production environments where downtime is prohibitively expensive. The large capacity, 13 kg precursor containers reduce the frequency of container change outs, thereby minimizing downtime and bubbler manipulation safety hazards by enabling larger batch sizes. The combination of advantages associated with the OM700 in a production environment results in reduced operational costs without compromised performance. In existing large bubbler technology, maintaining temperature control is often difficult because they use conventional heater baths. Another limitation of current bubbler technology is that the size of the bubbler itself is restricted to that of the installed bath. The OM700 overcomes these issues with an independent heating jacket and thermal control system that enable an increased volume to accommodate over nine liters of metal alkyl, while still maintaining strict temperature and operational controls.

Applications: Organometallic precursors, such as trimethylgallium (TMG),
trimethylaluminum (TMA) and triethylgallium (TEG).

Platform: The OM700's flux stability covers a range of operating temperatures from -10 degrees C to +30 degrees C, and ensures that all processes can be run at peak efficiency.

Availability: June 2008 onwards.

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