Product Briefing Outline: SAFC Hitech has introduced
the ‘EpiVapor’, a metalorganic vapor phase distribution system for
compound semiconductor manufacturing. EpiVapor is designed to eliminate
the need for localized tool bubblers and TCUs by delivering vapors from
highly volatile and sensitive pyrophoric liquids directly to MOCVD
systems.
Problem: Reducing the cost of transporting
metalorganic chemicals to the tool plays a significant part in reducing
overall COO. In addition, the reliable, flexible and highly
controllable dosimetry of organometallic precursors is of paramount
importance in production where downtime is prohibitively expensive,
especially in volume manufacturing environments.
Solution: EpiVapor
provides gas phase delivery of chemical vapors such as trimethylgallium
(TMG) and trimethylaluminum (TMA) directly to multiple deposition tools
in a safe, reproducible fashion. Flexible enough to connect to up to
eight independent tools, the continuous delivery of metalorganic vapors
offers a truly uninterrupted solution in the fabrication of
semiconductor devices. The EpiVapor’s design ensures precursor flux
stability in hydrogen (or other inert gas) carrier gas throughout the
life of the ampoule, while adjustable parameters ensure that processes
can be run at full capacity without stoppages to change out the tool
bubblers. This optimizes process efficiency, reduces operational costs
and increases safety, without compromising ultra high performance
levels, according to the company.
Applications:
Precursor vapor delivery for MOCVD/ALD deposition systems. TMG delivery
for MOVPE HBTs and HBLEDs; DEZ and TMG delivery for MOCVD Solar Cells;
TMA delivery for ALD high-k Al2O3 for logic, memory, and MEMS devices
as well as for other high volatility III-V and silicon semiconductor
precursors.
Platform: The EpiVapor system is
comprised of an electronic and chemical element. The touch screen
displays an array of information including bulk tank liquid levels,
valve configurations, fluid and vapor flow paths and system
pressure/vacuum, that allows the operation of the unit in both
automatic (auto) and manual (service) modes. The chemical section of
the EpiVapor system consists of a cabinet which is enhanced for the use
of pyrophoric materials with smoke detectors, audible and visual
alarms, a watchdog system for automatic operation, optional UV/IR flame
detector, 110% containment spill tray, and manifold with fail safe
pneumatic valves. The EpiVapor system is both S2-93/98 and S2-0200
certified and is CE marked, meeting all of the relevant European
directives.
Availability: June 2008 onwards.