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New Product: Oerlikon Leybold’s TURBOVAC SL pumps made for harsh environments
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Product Briefing Outline: Oerlikon Leybold Vacuum has introduced TURBOVAC SL, a line of high-reliability mechanical turbomolecular vacuum pumps for semiconductor manufacturing, analytical instrumentation, R&D and other demanding applications. The pumps feature extreme durability, ease of use and several innovations that simplify and improve incorporation into customer equipment.
Problem: OEMs are under increasing pressure to improve performance of their systems and make them easier to maintain so their customers can focus on their processes instead of infrastructure issues. At the same time, OEM equipment designers are seeking smaller footprints and more flexibility in pump placement and orientation, as well as tight integration into control systems.
Solution: TURBOVAC SL pumps feature a new compact space-saving housing. Ceramic ball bearings provide extreme durability under a wide range of operating conditions, with lubrication technology that enables installation vertically, sideways, upside down or in virtually any orientation. A wide variety of data interfaces (RS232, 485, Ethernet, profibus or 24V type) simplifies networking and digital control. Users can choose on-board electronics, to minimize external wiring and connections, or an external module that can be rack-mounted or placed on a desktop.
Applications: The most demanding requirements in manufacturing and R&D, including: Analytical instruments, Flat panel display production, DVD production, Leak detectors, Mass spectrometers, Electron microscopes, Gas and liquid chromatography, Inductively coupled plasma mass spectrometry, Coating technologies
Platform: The entire TURBOVAC family utilizes Oerlikon Leybold Vacuum’s unique rotor design, which the company claims incorporates the industry’s most precise and robust blade configuration for ultra-reliable operation at speeds of up to 70,000 rpm. The SL series pumps also include a novel sealing system that offers the highest resistance to mechanical and thermal shock, ensuring reliable operation under a wide range of conditions. Pumps are available in 80-, 300-, and 700-liter/second sizes.
Availability: Summer 2008.
