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New Product: Cymer’s new ‘Gas Lifetime eXtension’ upgrade offers 10x better gas exchanges
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Product Briefing Outline: Cymer has introduced the
Gas Lifetime eXtension (GLX) product. A stand-alone upgrade for new and
installed XLA laser systems, GLX is designed to increase scanner output
and availability by extending the time between excimer laser gas
exchanges by a factor of 10.
Problem: Memory device makers have particularly high
system utilization and require high levels of system uptime and
availability. Laser gas exchanges typically occur two to three times
each week (or every 100M pulses), with each exchange lasting
approximately 20 minutes. Scanner downtime from frequent gas exchanges
is reduced - with a GLX-enabled laser - by a factor of 10.
Solution:
A 4kHz scanner system will typically see increases from 2600 to 7800
wafer passes, and a 6kHz scanner system from 2400 to 7500 wafer passes
annually. Similar performance improvement is realized by logic- and
foundry-based systems, according to the company.
Applications: New and existing XLA products.
Platform: GLX
is an upgrade package consisting of both software and hardware to
support increased intervals between gas exchanges for lithography laser
systems. Additionally, the software component contains a new gas
control algorithm designed to enhance gas management for the system.
Availability: December 2007 onwards.