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New Product: Cymer‚??s new ‚??Gas Lifetime eXtension‚?? upgrade offers 10x better gas exchanges

29 November 2007 | By Mark Osborne | Product Briefings > Lithography

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CymerProduct Briefing Outline: Cymer has introduced the Gas Lifetime eXtension (GLX) product. A stand-alone upgrade for new and installed XLA laser systems, GLX is designed to increase scanner output and availability by extending the time between excimer laser gas exchanges by a factor of 10.  Problem: Memory device makers have particularly high system utilization and require high levels of system uptime and availability. Laser gas exchanges typically occur two to three times each week (or every 100M pulses), with each exchange lasting approximately 20 minutes. Scanner downtime from frequent gas exchanges is reduced - with a GLX-enabled laser - by a factor of 10.

Solution: A 4kHz scanner system will typically see increases from 2600 to 7800 wafer passes, and a 6kHz scanner system from 2400 to 7500 wafer passes annually. Similar performance improvement is realized by logic- and foundry-based systems, according to the company.

Applications: New and existing XLA products.

Platform: GLX is an upgrade package consisting of both software and hardware to support increased intervals between gas exchanges for lithography laser systems. Additionally, the software component contains a new gas control algorithm designed to enhance gas management for the system.

Availability: December 2007 onwards.

 

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