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New Product: BOC Edwards aims HELIOS 6 at high-flow gas abatement requirements
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Product Briefing Outline: BOC Edwards has introduced
the ‘HELIOS 6' gas abatement solution that uses its unique inward-fired
combustion technology for high hydrogen flow processes, such as Si and
SiGe epitaxy, LPCVD tungsten and compound semiconductor MOCVD. Both the
HELIOS product line and the proprietary inward-fired combustor
technology that it incorporates are well-established industry
standards. BOC Edwards has installed hundreds of HELIOS systems and
thousands of combustors worldwide.
Problem: In order to cleanly combust high flows of
hydrogen, an excess of air must be supplied to the combustor. If not
then high levels of CO, un-burnt hydrocarbons or even un-burnt hydrogen
may be emitted from the combustor. It must be supplied in a manner that
ensures that the hydrogen process gas will not cause flashbacks. The
variation in flows of hydrogen can also severely limit both the
efficiency and cleanliness of combustion.
Solution:
By adding air via an annulus to the nozzles the air only mixes with the
hydrogen during combustion. During periods when high flows of hydrogen
are not flowing the excess air must be stopped in order not to
extinguish the combustor. The unique control mechanism ensures that
efficiency is not compromised either with or without hydrogen flowing.
With six inlets for process gases, plus an additional inlet for gas box
purges or other ancillary operations, the Helios 6 gas abatement
solution can accommodate higher flow levels and more gas inlets, which
the company claims can substantially lower the overall cost of
ownership. High fuel efficiency and no requirement for compressed air
contribute additional cost savings when compared to alternative
technologies.
Applications: Designed to handle both toxic and carrier gases from Low Pressure Epitaxy and MOCVD.
Platform:
HELIOS 6 gas abatement solution, which can reduce hydrogen
concentrations below the lower explosive limit (LEL) in flows as high
as 200 slm, is available now on the standard HELIOS platform. The
six-inlet head design will also be available on BOC Edwards' line of
ATLAS gas abatement products in the future.
Availability: May 2007 onwards.
