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Oct 08, 2004 at 11:00 PM |
 Product Briefing Outline: Silicon Skunkworks Inc. has launched
the RB3S, a silane flash arrestor device that is placed inline on
operating Sih4 gas lines. If a breach occurs in the line, the device
will stop the reaction and protect expensive equipment and it will do
so regardless of whether the breach occurs upstream or downstream of the
device. The RB3S requires no power and acts as a double isolation valve
as well as a gas filter.
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Product Briefing Outline: TecHarmonic Inc. has launched the Alpine-S, claiming that it is the industry's first and only point-of-use (PoU) gas abatement system with the capability to abate all process and perfluorocompound (PFC) gas emissions with destruction and removal efficiencies (DRE) well over 95 percent for both chemical vapor deposition (CVD) and etch applications. 
Product Briefing Outline: Zellweger
Analytics has announced a major upgrade
to its MDA Scientific "Vertex" system - a
multi-point toxic gas monitoring system for
semiconductor fabrication.
