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WIN Semiconductors Corporation has placed a multiple system order with Aviza Technology, consisting of Sigma fxP PVD, Delta fxP CVD, Omega fxP and i2L etch systems. The tools will be used for various process technologies required to fabricate GaAs devices. Shipments will be completed in the fourth quarter of Aviza’s Fiscal Year 2008. Read more >>

Replisaurus Technologies has installed a SUSS MicroTec Gamma coating cluster that will be used for the development of Replisaurus’ ElectroChemical Pattern Replication (ECPR) technology and process applications.

 

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STMicroelectronics has placed a multi-million euro order with EV Group for a number of tools required for processing 300mm wafers for through-silicon-via (TSV) applications. The tools have been supplied and installed at STMicroelectronics’ Crolles2 pilot line in Crolles, France. The tools include EVG’s EVG150 Coater and EVG150 Developer and its new NanoSpray photoresist coating processing capabilities for steep topographies as part of its IQ Aligner. Read more >>

Eco-Snow Systems, an affiliate of The Linde Group, has announced the installation of two of its cleaning systems at two U.S.-based MEMS manufacturers. The Eco-Snow VersaClean system, used for cleaning of packaging components, and the Eco-Snow WaferClean system for released device level cleaning prior to wafer dicing, were recently installed at the two unnamed MEMS companies. Read more >>

Mattson Technology has purchased a SEM MC600i failure analysis tool from Sela for use in process fine-tuning and customer sampling purposes. The MC600i was delivered and installed at Mattson in the first quarter of 2008, the company said. 

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A Japanese-based IC manufacturer has purchased a Suprema photoresist strip system from Mattson Technology. According to Mattson, the order comes from a new account and extends its installed base of Suprema systems and increases its share of the photoresist strip market. Read more >>

Cambridge NanoTech has shipped its 100th ALD system to the Tata Institute of Fundamental Research (TIFR) in Mumbai, India, a major milestone for the company. The Savannah S100 will be used in the deposition of gate dielectric on nano-electric devices and in the coating of mesoporous structures. Read more >>

A major Korean memory manufacturer and a Korea-based IC packaging foundry have placed orders for a total of six Raider systems that will be used for electroplating, metal etch and photoresist stripping as well as advanced bumping, Cu Pillar, UBM Etch and resist strip applications.  Specialty chip interconnect metals used in 3D-TSV (through silicon via) applications are further uses for the tools, Semitool said. Read more >>

sp3 Diamond Technologies has received two new orders for its Model 650 hot filament chemical vapor deposition (HFCVD) diamond reactor. The India Institute of Technology (IIT) Madras will install one system as part of the expansion of its Nano Functional Materials Technology Centre (NFMTC). The second order comes from an unnamed Japanese manufacturer, sp3 said. Read more >>

Rite Track has announced its largest multi-product single order from an unnamed North American company. The order was for more than 12 combined SVG and TEL legacy track systems for use in 150mm applications. The SVG system provides simple serial wafer flow processing while the TEL system provides for a compact random-access wafer transfer capability. Read more >>