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Milestone: ASM has shipped over 500 atomic layer deposition reactors

13 July 2011 | Wafer Processing
ASM International has said it has reached a new milestone with the shipment of over 500 atomic layer deposition (ALD) reactors for use in semiconductor manufacturing. According to the company it now has ALD reactors in operation at a majority of advanced logic and memory fabs worldwide. The figure also includes Plasma Enhanced ALD systems which provide an advantage for certain applications, such as very low temperature processing. Read more >>

Order Focus: Novellus reaches 100th shipment of VECTOR Extreme PECVD system

08 July 2011 | Wafer Processing
Novellus Systems has reached a new milestone for its VECTOR Extreme plasma-enhanced chemical vapour deposition (PECVD) system, with the company shipping its 100th system. The VECTOR Extreme was introduced in July of 2007. Read more >>

Tool Order: Nova gains multiple orders for i500 integrated metrology system

07 July 2011 | Wafer Processing
Nova Measuring Instruments has received multiple orders for its i500 integrated metrology system from several customers. The orders followed the successful completion of a rigorous qualification process, conducted by these customers over several months, to be the primary platform for their integrated process control needs. Read more >>

Tool Order: FSI International wins repeat order from foundry

07 July 2011 | Wafer Processing
A leading IC foundry has placed a repeat order with FSI International for its ‘ORION’ single wafer cleaning system. The customer will use the system for back-end-of-line (BEOL) cleaning processes and is expected to be shipped in the fourth quarter of fiscal 2011. Read more >>

Order Focus: Akrion to ship GAMA wet stations to MEMS customers

06 July 2011 | Wafer Processing
Akrion Systems is to ship GAMA wet stations to a range of MEMS-product based manufacturers this year worth over US$20 million. The company will ship GAMA wet stations to the Centre de Collaboration MiQro Innovation (C2MI) in Bromont Technoparc, Quebec, Canada and to major suppliers of MEMS devices in Europe and Southeast Asia.  Read more >>

EV Group teams with Georgia Tech on SiGI Consortium research program

06 July 2011 | Wafer Processing
EV Group has joined the Georgia Institute of Technology 3D Systems Packaging Research Center (GT PRC) as a Manufacturing Infrastructure Member. EVG’s temporary bonding and debonding, chip-to-wafer bonding and lithography technology will be included in the PRC’s Silicon and Glass Interposer Industry (SiGI) Consortium research program in an effort to to understand the applicability of EVG’s manufacturing equipment and solutions for ultra-miniaturized device and systems packaging applications using through-silicon vias (TSVs). Read more >>

Tool Order: UMC places follow-on order with TEL

28 June 2011 | Wafer Processing
Tokyo Electron (TEL) has received a follow-on order from Taiwan-based foundry, UMC valued at approximately US$30.5 million. The order is TEL’s largest this year from UMC and one of largest so far placed by the foundry with equipment suppliers in 2011. Read more >>

SEMATECH details presence at SEMICON West

24 June 2011 | Wafer Processing
SEMATECH and International SEMATECH Manufacturing Initiative (ISMI) have highlighted the numerous presentations and public workshops the R&D organisation will be conducting during the annual SEMICON West event in San Francisco from July 11–15. Read more >>

Tool Order: Mattson receives follow-on multi-system orders for Etch and strip systems

22 June 2011 | Wafer Processing
A leading semiconductor manufacturer has placed follow-on multi-system orders with Mattson Technology. The equipment supplier said that order included ‘paradigmE’ etch and ‘SUPREMA’ strip tools and that shipments had already begun. The systems will be used for advanced etch and strip applications to produce chips that will be used in devices such as smart phones, personal computers and solid state drives, according to Mattson. Read more >>

Tool Order: UMC purchase equipment from Novellus Systems

21 June 2011 | Wafer Processing
Taiwan-based foundry, UMC had purchased a batch of semiconductor manufacturing tools from Novellus Systems. The purchase order is for approximately US$18.66 million. UMC’s capital expenditure in 2011 is expected to approximately US$1.8 billion. Read more >>