
At the upcoming Design Automation Conference (DAC) in San Diego
California, TSMC is to showcase its 20nm node ‘Transparent Double
Patterning’ design solution for the first time, which is a key part of
the on-going build up of 20nm design capability within the Open
Innovation Platform. The foundry is also detailing Reference Flow 12.0,
which features various enhancements for the 28nm node.
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Photoresist supplier, Fujifilm is joining SEMATECH’s Resist Materials
and Development Center (RMDC) at the College of Nanoscale Science and
Engineering (CNSE) of the University at Albany to collaborate on
critical resist issues in extreme ultraviolet (EUV) lithography.
SEMATECH’s RMDC will provide access to two micro-exposure tools (METs)
as well as several metrology tools for Fujifilm’s photoresist
development work.
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A perennial participant in a number of customer based supplier awards,
Toppan Photomask has bagged another for ‘Outstanding Service in 2010,’
this time with Singapore-based JV foundry, Silicon Manufacturing Company
Pte Ltd. (SSMC). According to the mask supplier, SSMC won the award
based on metrics in technology, support, quality, responsiveness,
commitment, logistics and price. Toppan also received bonus points for
supporting SSMC in meeting aggressive project timelines for new product
introductions.
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A single order worth approximately US$74.6 million has been placed by
DRAM memory manufacturer, Inotera Memories with lithography equipment
supplier ASML. The deal follows-on from a recent US$23.2 million tool
order with the Dutch firm.
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Major orders placed with Cymer in the second half of 2010 have begun to
translate into an increased level of lithography light source shipments
in the first quarter of 2011 as the company shipped 50 light sources in
the first quarter of 2011. Revenue totalled US$154.4 million compared to
revenue of US$113.8 million in the first quarter of 2010, and revenue
of US$146.9 million in the fourth quarter of 2010.
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With DRAM manufacturer, Inotera migrating technology to Micron’s stack
DDR 3 50nm process, the Taiwan-based firm has already been active this
year in purchasing a range of new processing equipment. However, the
latest purchase order is for lithography tools to be supplied by ASML at
a cost of US$23.2 million.
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Having recently places a lithography equipment order with rival Nikon,
worth approximately, US$23.4 million, Taiwan-based IC foundry, UMC has
placed a new order with ASML worth around US$51 million. The order was a
single not cumulative batch of orders.
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Taiwan foundry, UMC has placed a single order with Nikon worth approximately US$23.4 million. The order is believed to be for a single advanced lithography system for a 300mm fab, based in Taiwan.
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A series of orders worth approximately US$80.2 million have been placed
with lithography equipment leader, ASML by leading foundry, TSMC,
according to stock market filings. ASML has been TSMC’s main lithography
equipment supplier since inception.
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The first 100kV lithography system in Greece is to be supplied by Vistec
Lithography to the National Center for Scientific Research (NCSR
Demokritos). The nanotechnology centre purchased an EBPG5000plusES
system for one of its associated Institutes, IMEL (Installed at the
Institute of Microelectronics).
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