
With DRAM manufacturer, Inotera migrating technology to Micron’s stack
DDR 3 50nm process, the Taiwan-based firm has already been active this
year in purchasing a range of new processing equipment. However, the
latest purchase order is for lithography tools to be supplied by ASML at
a cost of US$23.2 million.
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Having recently places a lithography equipment order with rival Nikon,
worth approximately, US$23.4 million, Taiwan-based IC foundry, UMC has
placed a new order with ASML worth around US$51 million. The order was a
single not cumulative batch of orders.
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Taiwan foundry, UMC has placed a single order with Nikon worth approximately US$23.4 million. The order is believed to be for a single advanced lithography system for a 300mm fab, based in Taiwan.
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A series of orders worth approximately US$80.2 million have been placed
with lithography equipment leader, ASML by leading foundry, TSMC,
according to stock market filings. ASML has been TSMC’s main lithography
equipment supplier since inception.
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The first 100kV lithography system in Greece is to be supplied by Vistec
Lithography to the National Center for Scientific Research (NCSR
Demokritos). The nanotechnology centre purchased an EBPG5000plusES
system for one of its associated Institutes, IMEL (Installed at the
Institute of Microelectronics).
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Senior lithography experts at Intel talking at the 2011 SPIE Advanced
Lithography conference may have valid concerns over the readiness of
EUV lithography to enter volume production at the 10nm node, but another
Intel guru presented at SEMI organised ISS Europe earlier this week
was not so concerned.
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The eBeam Initiative has highlighted that several of its members will
present the latest breakthroughs in DFEB mask and direct write
technology at the Annual SPIE Advanced Lithography Symposium 2011. The eBeam Initiative also announced that four additional companies have
joined its ranks. These new members—Artwork Conversion, Grenon
Consulting, NCS and Xilinx—strengthen the ecosystem that is critical to
supporting the commercialization of DFEB technology.
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Building the infrastructure for EUV has been costly and thwart with
technical challenges of the last few years. At this year’s SPIE Advanced
Lithography conference, SEMATECH is using a series of technical paper
presentations to report the current progress on EUV.
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ETH Zurich has ordered an electron-beam lithography tool from Vistec
Lithography. The Vistec EBPG5200 will be installed in a new
Nanotechnology Center, which has been established in partnership between
IBM Research – Zurich and ETH Zurich. The tool will be used for
exploratory research aiming at nanotechnology applications such as
MEMS/NEMS, nanowires and carbon-based devices, amongst others.
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Cymer reported its seventh consecutive quarter of revenue growth with
fourth quarter revenue US$146.9 million compared to revenue of US$96.4
million in the fourth quarter of 2009, and revenue of US$141.7 million
in the third quarter of 2010. Cymer said that revenue for the full year
reached US$534.2 million compared to revenue of US$307.7 million in
2009.
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