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TSMC places equipment orders with Applied Materials, Varian and others

21 January 2011 | By Mark Osborne | News > Wafer Processing

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Although there is huge speculation over TSMC’s capital expenditure plans for this year, before an expected announcement next week, the leading foundry has officially spent US$170 million this week purchasing equipment from Applied Materials, Daifuku, DNS and Varian Semiconductor, according to financial filings in Taiwan.

The biggest chunk did not go to Applied Materials, rather that honour went to AMHS firm, Daifuku and its local Taiwanese subsidiary. In total Daifuku received approximately US$76.7 million in new orders, suggesting a major new or further expansion of AHMS at one or several 300mm fabs.

Applied Materials received orders worth approximately US$49.6 million, though equipment specifics were not detailed. DNS had accrued orders worth US$24.6 million, while ion implant equipment supplier Varian Semiconductor picked-up approximately US$19.8 million in new orders from TSMC.

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