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Tool Orders: ProMOS in follow-on orders with Mattson

12 September 2005 | By Syanne Olson | News > Wafer Processing

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ProMOS Technologies has awarded Mattson Technology with follow-on orders for its Aspen III ICPHT and Helios RTP systems. The systems are scheduled to begin shipment in September and will be used in ProMOS' 300 mm Fab 3 at Central Taiwan Science Park (CTSP) for the volume production of advanced memory devices, including 512 Mb and 1 Gb DDR2 DRAM stacked capacitors with 90 nm technology.

"We utilize the most advanced technology to expand our DRAM manufacturing capacity and ramp up production, allowing us to deliver high-quality products to the market quickly," said Dr. Len Mei, senior vice president of ProMOS Technologies. "Mattson's high-performance, low-cost-of-ownership strip and RTP systems, along with its excellent customer services in Taiwan, were key elements in our decision to continue to select the company as a business partner to supply our process technology requirements."

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