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Tool orders: Peter Wolters selects ADE‚??s wafer mapping & edge roll-off tool

26 October 2005 | By Syanne Olson | News > Wafer Processing

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Peter Wolters AG, a subsidiary of Novellus Systems Inc, has purchased ADE's "WaferSight" a high resolution (35nm) wafer geometry system for its R&D laboratory in Germany.

"The high precision surface mapping capabilities of the WaferSight, with integrated edge roll-off analysis, have allowed us to extend the results of our advanced polishing systems," stated Peter Wolters R&D Director Dr. Georg Moersch. "WaferSight helps us to have a better eye on tool performance for double-sided polishing, our AC line, and is even more important for the haze-free polishing feature of our newly developed HFP300 system. Within a short period of time, we have been able to identify and correct several process-specific signatures thereby further improving polished wafer quality. WaferSight is a valuable tool as we develop our equipment and processes for the 35nm technology node in order to maintain our leading position in this highly competitive market

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