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Tool Orders: LSI Logic uses Matera’s SENTRY CCM for copper electroplating

08 November 2005 | By Syanne Olson | News > Wafer Processing

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LSI Logic is now using Matera Inc's., SENTRY CCM tool for copper bath analysis as part of the copper electroplating process. Metara's SENTRY CCM is an inline mass spectrometry (ILMS) technology that analyses the chemical composition of the copper solution to provide constantly accurate and repeatable electroplating.

"Even as this company transitions to a fabless strategy, LSI Logic continues to serve as an industry role model by seeking new ways to increase manufacturing efficiencies," remarked Randy Clegg, VP of Sales and Marketing at Matera Inc. "As an early-stage company with a radically new metrology solution, Metara takes pride in partnering with innovators like LSI Logic to validate our technology and its yield advantages."

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