The system will be shipped during September to AMD's Fab 36, a 300mm fab in Dresden, Germany. The implanter will be used for volume production of advanced transistors using 65nm and 45nm device technologies. AMD was the first company to purchase the new single wafer platform, according to Axcelis.
"The relationship between AMD and Axcelis continues to strengthen as we achieve major performance milestones with our initial tool placement," said Mary Puma, chairman and CEO of Axcelis. "In particular, the Optima MD provides unmatched precision in the areas of dopant placement and angle control - two key advantages when producing advanced devices. Moreover, the platform's broad energy range delivers the flexibility and capital efficiency AMD needs to achieve its productivity goals."