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Tool Order: Wuhan Xinxin Semiconductor to use Mattson‚??s Suprema strip system

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Wuhan XinXinWuhan Xinxin Semiconductor Manufacturing Corporation (WXIC) has purchased a Suprema photoresist strip system from Mattson Technology for its first 300mm fab in Wuhan, China, operated by SMIC. The tool has already been shipped and marks the 100th Suprema tool shipment since introduced two years ago. 

"We selected the Suprema system due to its extremely high productivity with superior process performance, low COO and reliability,” noted John Liu, Vice President of the Wuhan project at SMIC.  “As the first 300mm fab in central China delivering advanced technologies, we seek partners who can contribute to improved efficiencies, economics and performance.  Mattson Technology is a valued partner with the requisite dedication to improvements in their customers' productivity."

“Wuhan Xinxin Semiconductor has selected the Suprema system including for advanced High Dose Implant Strip or HDIS applications - demonstrating their confidence in the system's ability and maturity to deliver the process expandability that can help speed critical time-to-market for Wuhan Xinxin Semiconductor's current and future products,” said Neal Holmlund, Sr. Vice President and General Manager of Mattson Technology's Surface Cleaning Group.

According to Fabtech’s own '300mm Activity Report,' WXIC is expected to ramp NAND flash production as well as logic IC production at the 300mm fab later in 2008, incorporating 90 through 65nm node processes.

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