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Tool Order: Vistec sells electron beam lithography system to Paul Scherrer Institute

26 May 2008 | By Síle Mc Mahon | News > Lithography

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VistecSwiss research facility, the Paul Scherrer Institute (PSI), has purchased an EBPG5000plus electron beam lithography system from Vistec Lithography. The system will be used at the Laboratory for Micro– and Nanotechnology (LMN) for the research on the optic, electronic, and magnetic properties of nanostructures as well as for the development of nano-devices for internal and external customers.

“The system will help us to keep track of our challenging research roadmap” says Dr. Christian David, Nanopatterning Group Manager at the LMN.

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