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Tool Order: Vistec sells electron beam lithography system to Paul Scherrer Institute
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Swiss research facility, the Paul Scherrer Institute (PSI), has
purchased an EBPG5000plus electron beam lithography system from Vistec
Lithography. The system will be used at the Laboratory for Micro– and
Nanotechnology (LMN) for the research on the optic, electronic, and
magnetic properties of nanostructures as well as for the development of
nano-devices for internal and external customers.
“The system will help us to keep track of our challenging research roadmap” says Dr. Christian David, Nanopatterning Group Manager at the LMN.