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Tool Order: Veeco sells InSight 3DAFM system to Korean IC manufacturer

02 October 2008 | By Mark Osborne | News > Wafer Processing

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InSight 3DAFMA Korean based IC manufacturer has purchased an InSight 3DAFM system from Veeco Instruments as well as announcing that another customer has accepted the same tool for Critical Dimension (CD) Reference Metrology for Optical Proximity Correction (OPC) modeling.

“Industry leaders such as Sematech have highlighted the need for improved OPC Metrology due to the limitations of current CD metrology tools,” noted Paul Clayton, Vice President, Veeco’s Automated AFM Business. “During the beta period, InSight 3DAFM was subject to extensive testing on a variety of OPC related structures such as lines, vias and line and space ends. Our customer’s excellent results demonstrated that InSight has the lowest measurement uncertainty of any CD metrology tool.”

The InSight 3DAFM is designed to handle 3D measurements of 45nm and 32nm semiconductor features.

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