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Tool Order: Ultratech wins volume ramp order for laser spike anneal

22 October 2010 | By Mark Osborne | News > Wafer Processing

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A large foundry in Asia has placed a significant multi-system, follow-on order with Ultratech for its laser spike anneal (LSA) tools. Ultratech's LSA100A systems will be used to support the foundry's 45nm production ramp, according to the company. Delivery of the systems is expected in the fourth quarter of 2010. Ultratech claims that its LSA systems are used at all the major logic foundries and, as a result, has become the foundries' tool of choice for advanced annealing applications.  

"Based on the success of its existing LSA systems, this top-tier customer placed a follow-on order for multiple LSA100A tools to support its 45nm production ramp," noted Jeff Hebb, Ph.D., Vice President of Laser Product Marketing at Ultratech.  "Foundries require a cost-effective solution that has the flexibility to process different product layouts without negatively affecting yield.”

Ultratech claims that its LSA systems are used at all the major logic foundries and, as a result, has become the foundries' tool of choice for advanced annealing applications.  

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