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Tool Order: U.S.-based IC manufacturer places follow-on Orion order with FSI

07 October 2009 | By Síle Mc Mahon | News > Wafer Processing

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FSI's OrionFSI International has revealed that it has been tapped for another of its Orion single-wafer cleaning tools in a follow-on order from an unnamed U.S. IC manufacturer. The customer in question will use FSI’s eight process chamber system for the fabrication of 32nm BEOL copper/low-k interconnects and for 22nm development activities.

The Orion system, which can cost between $2.5 million and $6 million, depending on the number of process chambers and configuration, will be shipped to the customer by the end of the year.
 
“This repeat order is especially important to us as it validates the extendibility of our FSI ORION technology for both 45nm and 32nm BEOL manufacturing and 22nm BEOL development,” said Don Mitchell, FSI’s president and CEO. “Concurrently, a major Korean customer is evaluating the FSI ORION system for FEOL applications, including our patented ViPR™+ technology that is being utilized to remove highly implanted photoresist with a unique one-step process.”

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