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Tool Order: TSMC weekly equipment roundup includes major follow-on orders for DNS

25 March 2011 | By Mark Osborne | News > Wafer Processing

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Purchase order’s placed by TSMC with equipment suppliers this week included orders for U.S.-based suppliers, Varian Semiconductor, Lam Research and KLA-Tencor. TSMC also placed follow-on orders with two Japan-based suppliers, DNS and Toyko Electron.

The largest batch of orders, were placed with DNS, valued at approximately US$67.7 million.

The second largest batch was placed with Lam Research, worth approximately US$27.2 million. KLA-Tencor also received a batch of orders that totalled approximately US$24.1 million from the foundry.

Ion implant equipment leader, Varian Semiconductor also received orders worth US$20.2 million.

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