A series of orders worth approximately US$80.2 million have been placed with lithography equipment leader, ASML by leading foundry, TSMC, according to stock market filings. ASML has been TSMC’s main lithography equipment supplier since inception.
Some of the orders accounted for were placed between July, 2010 and March, 2011 are worth US$17.1 million, while orders placed between January 27 and March 2011 are worth US$63 million.
ASML recently reported fourth quarter sales record of €1.5 billion, with sales coming from NAND Flash memory and foundry customers.
Over 50% of shipments in the quarter were for ‘dry’ lithography systems in particular KrF systems, a sign of capacity expansions underway at both NAND and foundry customers.