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Tool Order: TSMC places metrology orders with FEI and KLA-Tencor

30 August 2011 | By Mark Osborne | News > Wafer Processing

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Leading foundry, TSMC has recently placed a batch of accumulated purchase orders with two metrology tool specialists, KLA-Tencor and FEI. A regular recipient, KLA-Tencor received orders worth approximately US$30.9 million from mid-July through to mid-August.

FEI, known for its advanced TEM & SEM R&D systems has received accumulated purchase orders from TSMC valued at approximately US$18.4 million over the course of July through August.

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