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Tool Order: Toshiba selects Cymer as 300mm fab laser light source supplier
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Cymer has signed a multi-year unit agreement with Toshiba that includes
purchasing and support for krypton fluoride (KrF) and argon fluoride
(ArF) light sources in Toshiba's future 300mm investment plans.
"This agreement symbolizes Cymer's strong commitment to Toshiba's
business model and long-term success, as well as the rising adoption of
our next-generation XLR technology among top global chipmakers," said
Ed Brown, President and COO for Cymer. "We look forward to supporting
Toshiba's aggressive productivity improvement objectives for years to
come."
The contract also includes Cymer's ‘By the Pulse Program’ and its ‘Gas Lifetime eXtension’ (GLX) control system.