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Tool Order: SVTC to use Tegal‚??s etcher for MEMS and other device development

16 June 2008 | By Mark Osborne | News > Wafer Processing

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6500 HReSVTC Technologies has placed an order with Tegal for its ‘6500 HRe’ plasma etch tool that will be used for the development of a variety of novel memory, MEMS/MOEMS, photovoltaics, biotechnology and image sensor devices. Tegal and SVTC also said that they are working together on process recipe development for these applications.

“Tegal’s production-proven 6500 platform was the obvious choice for our customers with advanced memory development programs,” noted Wilbur Catabay, Vice President of Technology, SVTC. “With the Tegal tool, we can offer even more significant time-to-market advantages for the specialized materials, processes, and integration requirements of advanced memory device development and productization. In addition, the 6500 platform will be important for other customers who need advanced plasma etch capabilities. We see Tegal as our preferred strategic etch supplier for these important applications.”

“The Tegal 6500 will support SVTC’s companies needing specialized metal film etch, including but not limited to applications in non-volatile memory,” said Vahan Tchakerian, Vice President, Global Sales and Field Operations, Tegal Corporation. “We also expect to have a good collaboration with SVTC on process development for leading-edge applications in the advanced memory space, along with the other etch markets that SVTC serves.”

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