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Tool Order: SVTC to use Tegalâ??s etcher for MEMS and other device development
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SVTC Technologies has placed an order with Tegal for its ‘6500 HRe’
plasma etch tool that will be used for the development of a variety of
novel memory, MEMS/MOEMS, photovoltaics, biotechnology and image sensor
devices. Tegal and SVTC also said that they are working together on
process recipe development for these applications.
“Tegal’s production-proven 6500 platform was the obvious choice for our
customers with advanced memory development programs,” noted Wilbur
Catabay, Vice President of Technology, SVTC. “With the Tegal tool, we
can offer even more significant time-to-market advantages for the
specialized materials, processes, and integration requirements of
advanced memory device development and productization. In addition, the
6500 platform will be important for other customers who need advanced
plasma etch capabilities. We see Tegal as our preferred strategic etch
supplier for these important applications.”
“The
Tegal 6500 will support SVTC’s companies needing specialized metal film
etch, including but not limited to applications in non-volatile
memory,” said Vahan Tchakerian, Vice President, Global Sales and Field
Operations, Tegal Corporation. “We also expect to have a good
collaboration with SVTC on process development for leading-edge
applications in the advanced memory space, along with the other etch
markets that SVTC serves.”