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Tool Order: SUSS MicroTec supplies spin coater to Replisaurus

09 July 2008 | By Mark Osborne | News > Wafer Processing

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Gamma Coating ClusterReplisaurus Technologies has installed a SUSS MicroTec Gamma coating cluster that will be used for the development of Replisaurus’ ElectroChemical Pattern Replication (ECPR) technology and process applications.

"Replisaurus chose SUSS MicroTec to support us with superior coater and developer technology as SUSS is clearly the leader in this market. The SUSS Gamma system meets our high performance requirements by delivering consistently uniform results for a variety of challenging materials,” said James Quinn, CEO of Replisaurus Technologies.

"Replisaurus has been devoted to developing production processes for the advanced Packaging and 3D integration market," commented Rolf Wolf, General Manager of SUSS MicroTec Lithography Division. "We are excited to support their enabling technology with our Gamma system."

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