Strasbaugh's first STB P300 CMP system has been shipped to an unnamed U.S.customer. This is the first CMP system to incorporate Next Generation Factory principles for more responsive manufacturing. It supports small lot, high mix processing, shorter setup time, reduced first wafer delay,and incremental capacity increase.
"This first installation of the STB P300 in the U.S. is a milestone achievement for Strasbaugh and confirms market acceptance of the product, which was designed to meet the unique challenges of device manufacturing today and into the future," says Bob Roberts, executive director, Advanced CMP Technologies.
The STB P300 combines the production and process flexibility, including Strasbaugh's new nVision II optical endpoint detection system, next generation wafer carriers, ultra precision pad conditioner, and industry-proven integrated cleaning.