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Tool Order: STMicroelectronics in multiple gas abatement system deal

29 June 2006 | By Mark Osborne | News > EHS

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AlpineSTMicroelectronics has place a multiple systems order with TecHarmonic Inc for its new flagship Perfluorocompound (PFC) gas abatement system the Alpine-S. The systems are to be installed at STMicroelectronics fab in Singapore. Shipments have already started and will continue through the third quarter of 2006, according to the supplier.

"ST is setting a new standard for corporate environmental leaders and we're very proud to be playing a small part in their greenhouse gas emission reduction efforts," stated Bill Delaney, TecHarmonic's president and chief executive officer. "They were among the chief architects of the 1999 World Semiconductor Council's Agreement on PFC Emissions, even accelerating their efforts to hit the emission reduction goals two years ahead of the Council's 2010 deadline.  We're pleased that our Alpine-S system is meeting their stringent requirements, while helping them optimize the efficiency of their processing equipment."

According to TecHarmonic seven customers have placed multiple orders for a total of 38 Alpine-S systems, placing systems in three major fab regions: Europe, USA and Asia.

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