Online information source for semiconductor professionals

Tool Order: SEMATECH buys Imprio 300 imprint lithography tool from Molecular Imprints

27 February 2008 | By Mark Osborne | News > Lithography

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

Imprio 300SEMATECH has purchased an Imprio 300 imprint lithography tool from Molecular Imprints, Inc. (MII) to evaluate the use of the technology for a variety of real-world applications at the 32nm node and below. The collaborative partnership’s initial goal is to demonstrate and enhance overlay performance.  The Imprio 300 will be delivered to SEMATECH at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany in mid-2008.

  "As we move to sub-32nm, the costs and challenges of extending the lithography roadmap continue to escalate," said Michael Lercel, lithography director at SEMATECH. "One of SEMATECH's goals is to identify cost-effective and manufacturable technologies. Nanoimprint has demonstrated excellent resolution and image fidelity, so now is the time to evaluate its manufacturability. That is the goal of the SEMATECH program and our collaboration with Molecular Imprints."

Related articles

Tool Order: Yamagata Fujitsu purchases nano-patterning system from Molecular Imprints - 14 August 2008

Toshiba gets upgrade to imprint litho system from Molecular Imprints - 17 February 2010

DNP and Molecular Imprints lowering costs, speeding development together - 02 July 2009

New Product: Molecular Imprints‚?? ‚??Imprio‚?? 300 assists 32nm lithography R&D - 25 February 2008

Molecular Imprints secures $12.9 million financing round - 19 May 2008

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: