Mattson Technology has purchased a SEM MC600i failure analysis tool
from Sela for use in process fine-tuning and customer sampling
purposes. The MC600i was delivered and installed at Mattson in the
first quarter of 2008, the company said.
“The Sela microcleaving technology allows us to fine tune our processes for our customers and precisely isolate features on the wafer that demonstrates Mattson’s superior tool capability and process effectiveness,” said Dr. Raj Singh, Senior Staff Process Engineer at Mattson Technology. “The Sela tool is fast, efficient, convenient, and alleviates the need for manual preparation of the demo wafer, which is time consuming and cumbersome. With the Sela tool we can obtain accurate and usable results the first time.”