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Tool Order: Samsung Electronics selects Jordan Valley’s X-ray metrology system

18 May 2009 | By Mark Osborne | News > Wafer Processing

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Jordan Valley's JVX6200 XRR & XRF systemSamsung Electronics has selected Jordan Valley's X-ray metrology system for use in both FEOL and BEOL thin film metrology applications. Jordan Valley's JVX6200 XRR & XRF system was extensively evaluated by Samsung.

"Our evaluation demonstrated that the JVX6200 XRR with the JVXRR analysis software deliver superb results and outstanding throughput," noted Dr. B.H Lee, Sr. Manager of Metrology division. at Samsung Electronics Co. Ltd. Dr. Lee continued: "With the JVX6200, we are able to tighten our process control even for the most demanding thin films, while enhancing throughput and flexibility. The JVX6200 improves our productivity and yields."

This is another vote of confidence for our innovative products, designed for the demanding metrology needs with high throughput, small footprint and low COO, noted Isaac Mazor, President and CEO of Jordan Valley Semiconductors. "We look forward to continual support of Samsung's metrology needs as they evolve."

Jordan Valley has recently been selected by TSMC for advanced copper metrology requirements. The JVX6200 XRR analyzes single and multiple thin films metal and dielectric layers from 1 to 500 nm thick.    

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