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Tool Order: Sabanci University purchases e-beam tool from Vistec Lithography

27 January 2011 | By Mark Osborne | News > Lithography

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The newly formed Nanotechnology and Application Center (SUNAC) of the Sabanci University based in Istanbul has purchased an EBPG5000plusES e-beam lithography tool from Vistec Lithography. The Gaussian Beam system will be used for nanotechnology research with other institutions.

“The EBPG5000plusES is a 100kV high performance system, which is state of the art. It will enable us to address the nanotechnology development needs of natural sciences, applied sciences and engineering programs”, says Dr. Volkan Özgüz, Director of the Nanotechnology and Application Center. “Due to its flexibility and advantages, the EBPG5000plusES is a perfect investment for the future and will help to establish SUNAC as one of Turkeys leading nanotechnology institution.”

EBPG5000plusES is said to provide rapid exposure with a 25MHz rate and a minimum feature size of less than 8nm. The system is capable to expose various substrate types including masks and dimensions up to 150mm in size.

Vistec noted that it hoped to sell more e-beam tools to the R&D community in 2011.

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