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Tool order: Robert Bosch selects Lam Research Corporation’s TCP 9400DSiE MEMS etch system
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Robert Bosch GmbH, the MEMS sensor manufacturer, has placed an order with Lam Research Corporation for its TCP 9400DSiE deep silicon etch system, based on Lam’s TCP 9400 silicon etch series, of which more than 1,500 chambers have been installed worldwide.
“The Bosch name is synonymous in the industry with deep silicon etch technology, so we are extremely pleased our TCP 9400DSiE etch system has been qualified by Bosch,” said Marshall Benham, MEMS product line head at Lam Research. “This decision signals the need for production-proven solutions in growing MEMS segments that are transitioning to volume manufacturing. These customers expect the highest degree of technology embedded on manufacturing-worthy platforms.”