Oxford Instruments has reported a multi-system order from the King Abdullah University of Science and Technology (KAUST) in Saudi Arabia, completed earlier this year. The tools in the sizeable order consisted of multiple plasma etch, deposition and growth systems.
KAUST’s Nanofabrication Core research facility will receive the equipment, including Oxford Instruments Plasma Technology (OIPT) systems such as PlasmalabSystem100 tools for RIE and ICP etch, and PECVD. Oxford Instruments had recently installed OIPT in a new cleanroom research facility at the Southampton University in the UK.
VP Research Development at KAUST, Dr. Mohamed Samaha said, "This equipment is for our Nanofabrication Core Lab, and comprises tools for nano-material fabrication incorporating etching, deposition and growth. These will make our core labs among the most advanced in the world. Researchers at KAUST will be able to utilize these tools in the clean room for the manufacture of nano-materials to advance the research agenda at KAUST."