Online information source for semiconductor professionals

Tool order: Oerlikon Systems inks cluster tool deal with major foundry

Popular articles

New Product: Applied Materials new EUV reticle etch system provides nanometer-level accuracy - 19 September 2011

Oberai discusses Magma’s move into solar PV yield management space - 29 August 2008

‚??Velocity‚?? the new buzzword in Intel‚??s PQS annual awards - 12 April 2012

Applied Materials adds Jim Rogers to Board of Directors - 29 April 2008

New Product: ASML Brion‚??s Tachyon MB-SRAF enables OPC-like compute times - 19 September 2011

Oerlikon Systems' Clusterline 300IIOerlikon Systems has signed an order for the delivery of several of its Clusterline 300II tools to the world’s largest semiconductor foundry, TSMC. The deal, the value of which was undisclosed, overrides orders for the same tool received from key semiconductor manufacturers in South Korea and Taiwan. The Clusterline 300II is a cluster tool specifically designed for advanced packaging and backside metallization for wafer sizes up to 300mm.

“The ever increasing interest in our Clusterline products has been expected but the large multiple orders have exceeded our expectations,” said Andreas Dill, Head of Oerlikon Systems. “Our efforts focus on optimizing innovative solutions for under bump metallization (UBM), redistribution layers, backside metallization and ultra thin wafer processing.”

The success and popularity of the tool is, according to the company, due in large part to the involvement of marketing, sales and service company DKSH Taiwan. Oerlikon Systems brought the company on board in May 2009; since then, the DKSH Taiwan team has been working closely with the Oerlikon product managers and development teams to aid in succeeding in the Taiwan market.

Related articles

Tool order: Taiwanese foundry places multiple CMP inspection systems order with Rudolph - 08 December 2009

Oerlikon offloads two semiconductor equipment units - 26 January 2009

Tool order: Tegal receives follow-on order for 4200 SE cluster tool - 08 June 2010

Tool Order: Major Asian foundry places multiple Suprema order with Mattson - 14 July 2008

Oerlikon Systems taps DKSH for after-sales services in China and Taiwan - 16 June 2009

Reader comments

No comments yet!

Post your comment

Please enter the word you see in the image below: