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Tool Order: Novellus uses CyberOptics‚?? ‚??WaferSense‚?? technology for in-field tool maintenance

17 April 2008 | By Mark Osborne | News > Wafer Processing

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WaferSenseNovellus Systems has placed multiple orders with CyberOptics Semiconductor for its ‘WaferSense’ Automatic Gapping System for use with Novellus’ ‘VECTOR Express’ and ‘VECTOR Extreme’ Plasma-Enhanced Chemical Vapor Deposition (PECVD) systems with respect to spacing specifications between the tool’s showerhead and the wafer.

“As an equipment supplier to the highly competitive semiconductor industry, Novellus is constantly looking for ways to make our equipment more productive for our customers,” said Tim Archer, Senior Vice President and General Manager of Novellus’ PECVD Business Unit. “By arming our engineers with CyberOptics’ innovative Automatic Gapping System, we have been able to deliver industry-leading dielectric film uniformity on VECTOR and at the same time significantly reduce maintenance costs and system downtime.”

“Increasing process tool accuracy and precision is critical for 300mm fabs,” said Craig Ramsey, General Manager of CyberOptics Semiconductor. “We are extremely pleased to have had the opportunity to collaborate with Novellus during the development of this WaferSense application. The Novellus action to equip their engineers with Automatic Gapping Systems underscores the value these tools deliver to semiconductor fabricators worldwide.”

Using the technology, service engineers can quickly measure and adjust showerhead-to-platen gaps to improve dielectric film uniformity and repeatability. The real-time data provided by the Automatic Gapping System is claimed to speed up maintenance cycles by as much as 60 percent.

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