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Tool Order: Nova‚??s integrated metrology systems now used by two flash memory manufacturers

07 July 2009 | By Mark Osborne | News > Wafer Processing

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Two leading flash memory manufacturers are now using Nova Measuring Instruments' NovaScan Integrated Metrology systems. Installations took place during the first half of 2009, the company said. The NovaScan has been deployed for copper process control. Nova also reported more orders received at the beginning of July 2009 for similar tools from a major foundry. These systems will be delivered in the third quarter of 2009.

"As part of the move to the 50nm and 40nm technology nodes, memory manufacturers start integrating Copper into their devices and Optical CD provides a useful means to measure and control relevant steps in the process" said Noam Shintel, Director of Corporate marketing at Nova. "With our solution already deployed in foundries and given the rapid proliferation of Copper to the memory sector, I see a great potential for our metrology solutions. By deploying Nova's metrology together with wafer to wafer process control, memory manufacturers can significantly improve their Copper process and reduce Copper process variability by dozens of percentage points."

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