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Tool Order: Nova scores 22nm metrology order with foundry

24 May 2010 | By Mark Osborne | News > Wafer Processing

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A leading IC foundry has placed a multi-million dollar order with Nova Measuring Instruments for both stand-alone and metrology integrated metrology systems that will be deployed at advanced technology nodes down to 22nm for copper process control. Shipments will take place during the second and third quarters of 2010.

“We continue to see strong demand for both our integrated and stand alone metrology solutions from leading foundries as they continue to execute on their aggressive technology advancement plans and implement advanced process control solutions”, said Noam Shintel, Director of Marketing at Nova. “The majority of these systems will implement Copper process control which provides strong indication of the market leadership we have attained in this critical manufacturing step. We expect to see more orders from this and other foundries as they expand their capacity further into the year”.

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