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Tool Order: Nova gains multiple orders for i500 integrated metrology system

07 July 2011 | By Mark Osborne | News > Wafer Processing

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Nova Measuring Instruments has received multiple orders for its i500 integrated metrology system from several customers. The orders followed the successful completion of a rigorous qualification process, conducted by these customers over several months, to be the primary platform for their integrated process control needs.

According to Nova, the i500 demonstrated more than 30% improvement in throughput and precision compared to the previous model in various production scenarios.

Nova noted that IC manufacturers needed a narrower wafer-to-wafer process window for CMP process control, which required higher level of measurement precision and tool to tool matching in a shorter period of time.

"The demand for a fast integrated metrology tool that combines precise and sensitive metrology performance along with uncompromised requirements for reliability and Cost of Ownership have become the market standard. Moving to advanced technology nodes will require larger sampling schemes that include Optical CD measurements in order to control the ever tightening CMP process specs. Nova i500 core technology meets all of these requirements for advanced process control both in the Foundries and Memory market segments. We are pleased to see that our customers appreciate our proven record and market leadership and decided to keep ordering Nova's latest advanced integrated tool that will assist them to be competitive in their respective markets," said Eitan Oppenhaim, EVP, Global Business Group.

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