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Tool Order: Nanometrics receives complete CD metrology suite order

10 January 2011 | By Mark Osborne | News > Wafer Processing

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lynxA leading Japanese semiconductor manufacturer has placed an order with Nanometrics for a complete suite of optical critical dimension (OCD) products in support of capacity expansion for devices at advanced process nodes. Included in the order is a Lynx cluster metrology platform, IMPULSE systems for in-line OCD control and Nanometrics’ proprietary NanoCD Suite.

“Our IMPULSE modules, when combined with our Lynx platform and NanoCD capabilities, enable the lowest cost of ownership for in-line critical dimension and thin film metrology,” commented David Doyle, vice president of the Silicon Solutions Business Unit at Nanometrics.

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