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Tool Order: Nanometrics OCD metrology systems bought by Asian foundry
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An Asian foundry has selected the Atlas XP+ optical critical dimension (OCD) metrology system from Nanometrics to be used for process control of advanced logic devices. According to Nanometrics the Atlas XP+ platform was selected over competitive solutions after a comprehensive head-to-head evaluation of technical performance on advanced devices.“As logic manufacturer’s drive to smaller technology nodes, the combination of new device structures and exotic materials such as 3D structures and high-K metal gates challenge the limits of process control,” said David Doyle, vice president of Nanometrics’ Semiconductor Business Unit. “Nanometrics’ OCD technology is a proven solution to this challenge and has become a key enabler for device yield and lower manufacturing costs.”